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Proceedings Paper

Near-field nano-imaging by nanophotodetector array
Author(s): Boyang Liu; Ki Young Kim; Yingyan Huang; Seng-Tiong Ho
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Paper Abstract

The possibility of imaging objects at the resolution of smaller than the optical diffraction limit is of great interest to nanotechnologies and biotechnologies. In this paper, we present a novel near-filed nano-imaging device based on nanophotodetector(NPD) array, which is capable of addressing function. Multi-level Multi-electron(MLME) Finitedifference time-domain(FDTD) method is used to simulate the performance of NPD array. The simulation shows a highest obtainable resolution of 150nm for the light with 1.55μm wavelength. Various photolithography, e-beam lithography and etching back techniques have been developed to realize the NPD device. Up to 4x4 slab version NPD array with various resolutions have been successfully realized. The smallest pixel size is as small as 150nm.

Paper Details

Date Published: 9 February 2009
PDF: 8 pages
Proc. SPIE 7218, Integrated Optics: Devices, Materials, and Technologies XIII, 72180Q (9 February 2009); doi: 10.1117/12.808635
Show Author Affiliations
Boyang Liu, Northwestern Univ. (United States)
Ki Young Kim, Northwestern Univ. (United States)
Yingyan Huang, Northwestern Univ. (United States)
Seng-Tiong Ho, Northwestern Univ. (United States)

Published in SPIE Proceedings Vol. 7218:
Integrated Optics: Devices, Materials, and Technologies XIII
Jean-Emmanuel Broquin; Christoph M. Greiner, Editor(s)

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