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Proceedings Paper

Nanostructure formation processes in femtosecond laser ablation of thin film surfaces
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Paper Abstract

We have studied periodic nanostructure formation processes on hard thin film surfaces in femtosecond laser ablation. Using diamond-like carbon films patterned with submicrometer-size stripes, we found that the nanoscale ablation is preferentially initiated by the enhancement of a local field on the stripe surface having high curvature. Based on the experimental results for the initial stage of nanostructuring, it is concluded that the nanoscale ablation is initiated with the enhanced local field, and the periodicity is developed with the excitation of surface plasmon polaritons.

Paper Details

Date Published: 12 February 2009
PDF: 11 pages
Proc. SPIE 7201, Laser Applications in Microelectronic and Optoelectronic Manufacturing VII, 720102 (12 February 2009); doi: 10.1117/12.807681
Show Author Affiliations
Godai Miyaji, Kyoto Univ. (Japan)
Kenzo Miyazaki, Kyoto Univ. (Japan)

Published in SPIE Proceedings Vol. 7201:
Laser Applications in Microelectronic and Optoelectronic Manufacturing VII
Michel Meunier; Andrew S. Holmes; Hiroyuki Niino; Bo Gu, Editor(s)

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