Recent development of research on the nonlinearity of the heterodyne interferometers provides an approach to eliminate the nonlinearity of heterodyne interferometer using a simple phase compensation system by rotating a polarizer which is set up before the detector in the interferometer.[17] This paper shows the experiment results which proved its general validity for elimination of the nonlinearity errors whether it is a first-order or a higher-order error. It explains which accuracy can be expected and provides the application opportunities based on theoretical analyses and experiment results.

Date Published: 12 January 2009
PDF: 7 pages
Proc. SPIE 7133, Fifth International Symposium on Instrumentation Science and Technology, 713302 (12 January 2009); doi: 10.1117/12.807564

Published in SPIE Proceedings Vol. 7133:
Fifth International Symposium on Instrumentation Science and Technology
Jiubin Tan; Xianfang Wen, Editor(s)