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Proceedings Paper

Micro-assembly of three-dimensional rotary MEMS mirrors
Author(s): Lidai Wang; James K. Mills; William L. Cleghorn
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Paper Abstract

We present a novel approach to construct three-dimensional rotary micro-mirrors, which are fundamental components to build 1×N or N×M optical switching systems. A rotary micro-mirror consists of two microparts: a rotary micro-motor and a micro-mirror. Both of the two microparts are fabricated with PolyMUMPs, a surface micromachining process. A sequential robotic microassembly process is developed to join the two microparts together to construct a threedimensional device. In order to achieve high positioning accuracy and a strong mechanical connection, the micro-mirror is joined to the micro-motor using an adhesive mechanical fastener. The mechanical fastener has self-alignment ability and provides a temporary joint between the two microparts. The adhesive bonding can create a strong permanent connection, which does not require extra supporting plates for the micro-mirror. A hybrid manipulation strategy, which includes pick-and-place and pushing-based manipulations, is utilized to manipulation the micro-mirror. The pick-andplace manipulation has the ability to globally position the micro-mirror in six degrees of freedom. The pushing-based manipulation can achieve high positioning accuracy. This microassembly approach has great flexibility and high accuracy; furthermore, it does not require extra supporting plates, which greatly simplifies the assembly process.

Paper Details

Date Published: 23 February 2009
PDF: 12 pages
Proc. SPIE 7208, MOEMS and Miniaturized Systems VIII, 72080B (23 February 2009); doi: 10.1117/12.807497
Show Author Affiliations
Lidai Wang, Univ. of Toronto (Canada)
James K. Mills, Univ. of Toronto (Canada)
William L. Cleghorn, Univ. of Toronto (Canada)

Published in SPIE Proceedings Vol. 7208:
MOEMS and Miniaturized Systems VIII
David L. Dickensheets; Harald Schenk; Wibool Piyawattanametha, Editor(s)

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