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Proceedings Paper

Preconcentrator-based sensor µ-system for low-level benzene detection
Author(s): P. Ivanov; I. Gràcia; F. Blanco; J.-P. Raskin; R. Cumeras; N. Sabaté; X. Vilanova; X. Correig; L. Fonseca; E. Figueras; J. Santander; C. Cané
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Paper Abstract

In this paper, a preconcentrator-based sensor &mgr;-system for low level benzene detection is presented. It consists of a spiral-shaped &mgr;-reconcentrator with dimensions of 10cm × 300&mgr;m × 300&mgr;m, followed by a &mgr;-hotplate sensor matrix. The &mgr;-preconcentrator was fabricated on a silicon wafer by means of DRIE and anodic bonding techniques. To obtain the concentration factor of the fabricated devices, a GC/MS: Shimadzu-QP5000 equipment was used. The results obtained showed excellent repeatability and preconcentration factors up to 286. A considerable improvement (1500%) in the sensor responses was achieved with Pd doped SnO2 sensors. The small size of the manufactured devices enables their incorporation in an integrated GC/MS gas sensor system.

Paper Details

Date Published: 30 December 2008
PDF: 8 pages
Proc. SPIE 7268, Smart Structures, Devices, and Systems IV, 72680S (30 December 2008); doi: 10.1117/12.807433
Show Author Affiliations
P. Ivanov, National Ctr. of Microelectronics (Spain)
I. Gràcia, National Ctr. of Microelectronics (Spain)
F. Blanco, Univ. Rovira i Virgili (Spain)
J.-P. Raskin, Univ. Catholique de Louvain (Belgium)
R. Cumeras, National Ctr. of Microelectronics (Spain)
N. Sabaté, National Ctr. of Microelectronics (Spain)
X. Vilanova, Univ. Rovira i Virgili (Spain)
X. Correig, Univ. Rovira i Virgili (Spain)
L. Fonseca, National Ctr. of Microelectronics (Spain)
E. Figueras, National Ctr. of Microelectronics (Spain)
J. Santander, National Ctr. of Microelectronics (Spain)
C. Cané, National Ctr. of Microelectronics (Spain)

Published in SPIE Proceedings Vol. 7268:
Smart Structures, Devices, and Systems IV
Said Fares Al-Sarawi; Vijay K. Varadan; Neil Weste; Kourosh Kalantar-Zadeh, Editor(s)

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