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Proceedings Paper

Flexible visual feedback for automated nanohandling inside an SEM
Author(s): S. Fatikow; D. Jasper; C. Edeler; C. Dahmen
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Paper Abstract

This paper describes the implementation of several key components that were used to build a prototype for a versatile camera system operating in a scanning electron microscope. For the precise alignment of the camera inside the vacuum chamber, a stick-slip-based actuator was developed, that can create a high torque while having small dimensions. The camera is mounted on a rail and carriage system and the implemented combination of absolute and relative optical sensors is described. Finally, several object tracking scenarios are defined and first results of implemented tracking algorithms are given.

Paper Details

Date Published: 17 November 2008
PDF: 10 pages
Proc. SPIE 7266, Optomechatronic Technologies 2008, 72660X (17 November 2008); doi: 10.1117/12.807090
Show Author Affiliations
S. Fatikow, Univ. of Oldenburg (Germany)
D. Jasper, Univ. of Oldenburg (Germany)
C. Edeler, Univ. of Oldenburg (Germany)
C. Dahmen, Univ. of Oldenburg (Germany)

Published in SPIE Proceedings Vol. 7266:
Optomechatronic Technologies 2008
John T. Wen; Dalibor Hodko; Yukitoshi Otani; Jonathan Kofman; Okyay Kaynak, Editor(s)

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