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Proceedings Paper

Basic research on micro-nano-instruments by femtosecond laser ablation on metal surface
Author(s): Xiaochang Ni; Ru Hong; Qi Sun; Ching-Yue Wang; Lu Chai; Wei Jia
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Paper Abstract

Nano-particles and nano-period ripples can be used to form some micro-nano-instruments in microelectronics. In this paper a femtosecond (fs) pulse laser (148fs, 1KHz, center wavelength=775nm) is used to irradiate on metal surface, then nano-particles and nano-period ripples can be obtained in the focal scale, the size of which is shorter than the center wavelength. For describing the formation time and characteristic of nano-particles and nano-period ripples, we have increased the laser fluence from the threshold of material to a higher value and increased the laser exposure time in fixed laser fluence on different materials. Experimental results show that nano-particles occur earlier than nano-period ripples. And as the fs laser pulse number being increased, the periodical nano-ripples is clearer and clearer and the depth of ripples is deeper and deeper. Finally, permanent ablation will occur in the focal scale basing on the nano-ripples. After surface plasmon polaritons theory is used, the period of nano-ripples can be explained exactly. This work is the basic research for micro-nano-instruments by fs laser ablation technique on metal surface.

Paper Details

Date Published: 12 January 2009
PDF: 7 pages
Proc. SPIE 7133, Fifth International Symposium on Instrumentation Science and Technology, 71334C (12 January 2009); doi: 10.1117/12.805569
Show Author Affiliations
Xiaochang Ni, Tianjin Univ. of Technology and Education (China)
Tianjin Univ. (China)
Ru Hong, Tianjin Univ. of Technology and Education (China)
Qi Sun, Tianjin Univ. (China)
Ching-Yue Wang, Tianjin Univ. (China)
Lu Chai, Tianjin Univ. (China)
Wei Jia, Tianjin Univ. (China)

Published in SPIE Proceedings Vol. 7133:
Fifth International Symposium on Instrumentation Science and Technology
Jiubin Tan; Xianfang Wen, Editor(s)

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