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Proceedings Paper

Design and fabrication of SU-8 polymer-based micro-racetrack resonators
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Paper Abstract

By using small SU-8 polymer ridge waveguides, compact micro-racetrack resonator (MRR) add-drop filters are presented. This used small ridge waveguide has an air-cladded SU-8 polymer core (n~1.573) on a SiO2 buffer (n~1.445) so that the bending radius could be as small as ~102μm. Considering the resolution limitation of a regular UV-lithography process, the gap in the coupling region of the present MRR in our design is no less than 1.0 μm. In order to enhance the coupling between the access optical waveguide and the micro-racetrack, narrow optical waveguides are used in the coupling regions. Meanwhile, wide optical waveguides are used in the bending sections to have a small bending radius. And a single-side taper is used to connect these two sections with different widths so that the gap width is kept as small as 1.0 μm in the whole region. With a regular UV lithography process, the designed micro-racetrack resonator (MRR) add-drop filters are fabricated. The measured propagation loss for straight waveguides is about 0.1dB/mm and the measured spectral responses of the through/drop ports show a Q-factor of 8000.

Paper Details

Date Published: 11 November 2008
PDF: 7 pages
Proc. SPIE 7134, Passive Components and Fiber-based Devices V, 713414 (11 November 2008);
Show Author Affiliations
Daoxin Dai, Zhejiang Univ. (China)
Bo Yang, Zhejiang Univ. (China)
Liu Yang, Zhejiang Univ. (China)
Zhen Sheng, Zhejiang Univ. (China)

Published in SPIE Proceedings Vol. 7134:
Passive Components and Fiber-based Devices V
Ming-Jun Li; Ping Shum; Ian H. White; Xingkun Wu, Editor(s)

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