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Proceedings Paper

Subnanometer characterization of large aperture optical components using broad-band interferometry
Author(s): A. M. Sergeev; E. A. Khazanov; I. E. Kozhevatov; D. E. Silin
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Paper Abstract

A new method of high order broad-band optical interferometry is presented. The core concept is to use surface control of broad-band radiation with a complex, specially prepared spectrum. High order broad-band interferometers have several merits: selectivity along the line of sight, high noise immunity (and correspondingly high accuracy) and the possibility of carrying out precise measurements without mechanically moving the reference or test plates. These interferometers permit control of large aperture optical elements (including remote control) with nanometer and even subnanometer accuracy. Some application examples of high order broad-band interferometry are demonstrated.

Paper Details

Date Published: 5 June 2008
PDF: 11 pages
Proc. SPIE 7022, Advanced Laser Technologies 2007, 70220I (5 June 2008); doi: 10.1117/12.803935
Show Author Affiliations
A. M. Sergeev, Institute of Applied Physics (Russia)
E. A. Khazanov, Institute of Applied Physics (Russia)
I. E. Kozhevatov, Institute of Applied Physics (Russia)
D. E. Silin, Institute of Applied Physics (Russia)

Published in SPIE Proceedings Vol. 7022:
Advanced Laser Technologies 2007
Ivan Alexandrov Shcherbakov; Risto Myllylä; Alexander V. Priezzhev; Matti Kinnunen; Vladimir I. Pustovoy; Mikhail Yu. Kirillin; Alexey P. Popov, Editor(s)

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