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Proceedings Paper

Design and fabrication of visible/mid-infrared dual-band microfilter array
Author(s): Huafeng Liang; Jianjun Lai; Zhiping Zhou; Li Li
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Paper Abstract

Integrated visible/infrared dual-band filter array is the key component of compact, lightweight, rigid miniature dual-band CCD sensing system. Interference cut-off filter array and interference absorbing filter array have been designed for infrared and visible pass band respectively. A simple, effective and compatible with high temperature deposition process lift-off technique for striping thick infrared film was investigated. Integrating photolithography, ion beam assisted electron beam physical vapor deposition and improved lift-off process, dual-band microfilter array with good performance was fabricated on the same sapphire substrate consecutively. Details of design and fabricating procedure are elucidated, and experimental results are presented.

Paper Details

Date Published: 18 November 2008
PDF: 9 pages
Proc. SPIE 7135, Optoelectronic Materials and Devices III, 71350S (18 November 2008); doi: 10.1117/12.803203
Show Author Affiliations
Huafeng Liang, Wuhan National Lab. for Optoelectronics (China)
Huazhong Univ. of Science and Technology (China)
Jianjun Lai, Wuhan National Lab. for Optoelectronics (China)
Huazhong Univ. of Science and Technology (China)
Zhiping Zhou, Wuhan National Lab. for Optoelectronics (China)
Li Li, Chongqing Optoelectronics Research Institute (China)

Published in SPIE Proceedings Vol. 7135:
Optoelectronic Materials and Devices III
Yi Luo; Jens Buus; Fumio Koyama; Yu-Hwa Lo, Editor(s)

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