Proceedings Paper
Design and fabrication of visible/mid-infrared dual-band microfilter array| Format | Member Price | Non-Member Price |
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Paper Abstract
Integrated visible/infrared dual-band filter array is the key component of compact, lightweight, rigid miniature dual-band
CCD sensing system. Interference cut-off filter array and interference absorbing filter array have been designed for
infrared and visible pass band respectively. A simple, effective and compatible with high temperature deposition process
lift-off technique for striping thick infrared film was investigated. Integrating photolithography, ion beam assisted
electron beam physical vapor deposition and improved lift-off process, dual-band microfilter array with good
performance was fabricated on the same sapphire substrate consecutively. Details of design and fabricating procedure are
elucidated, and experimental results are presented.
Paper Details
Date Published: 18 November 2008
PDF: 9 pages
Proc. SPIE 7135, Optoelectronic Materials and Devices III, 71350S (18 November 2008); doi: 10.1117/12.803203
Published in SPIE Proceedings Vol. 7135:
Optoelectronic Materials and Devices III
Yi Luo; Jens Buus; Fumio Koyama; Yu-Hwa Lo, Editor(s)
PDF: 9 pages
Proc. SPIE 7135, Optoelectronic Materials and Devices III, 71350S (18 November 2008); doi: 10.1117/12.803203
Show Author Affiliations
Huafeng Liang, Wuhan National Lab. for Optoelectronics (China)
Huazhong Univ. of Science and Technology (China)
Jianjun Lai, Wuhan National Lab. for Optoelectronics (China)
Huazhong Univ. of Science and Technology (China)
Huazhong Univ. of Science and Technology (China)
Jianjun Lai, Wuhan National Lab. for Optoelectronics (China)
Huazhong Univ. of Science and Technology (China)
Zhiping Zhou, Wuhan National Lab. for Optoelectronics (China)
Li Li, Chongqing Optoelectronics Research Institute (China)
Li Li, Chongqing Optoelectronics Research Institute (China)
Published in SPIE Proceedings Vol. 7135:
Optoelectronic Materials and Devices III
Yi Luo; Jens Buus; Fumio Koyama; Yu-Hwa Lo, Editor(s)
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