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Proceedings Paper

Direct measurement of the linewidth of relief element on AFM in nanometer range
Author(s): Yu. A. Novikov; M. N. Filippov; I. D. Lysov; A. V. Rakov; V. A. Sharonov; P. A. Todua
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Paper Abstract

The article includes the results of the study of image formation in atomic force microscope (AFM). The influence of radius and angle characteristics of cantilever tip as well as the relief of the surface studied on the signal waveform is shown. The authors demonstrate the techniques of AFM calibration and direct measurement of linear sizes of trapezoid structures including the line width with the use of AFM signal and its first derivative. There were obtained the equations establishing relations the sizes of trapezoid structures with the sizes of test segments chosen on AFM signals.

Paper Details

Date Published: 29 April 2008
PDF: 10 pages
Proc. SPIE 7025, Micro- and Nanoelectronics 2007, 702510 (29 April 2008); doi: 10.1117/12.802427
Show Author Affiliations
Yu. A. Novikov, A.M. Prokhorov General Physics Institute (Russia)
M. N. Filippov, N.S. Kurnakov Institute of General and Inorganic Chemistry (Russia)
I. D. Lysov, Moscow Institute of Physics and Technology (Russia)
A. V. Rakov, A.M. Prokhorov General Physics Institute (Russia)
V. A. Sharonov, Moscow Institute of Physics and Technology (Russia)
P. A. Todua, Ctr. for Surface and Vacuum Research (Russia)

Published in SPIE Proceedings Vol. 7025:
Micro- and Nanoelectronics 2007
Kamil A. Valiev; Alexander A. Orlikovsky, Editor(s)

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