
Proceedings Paper
Characterizing OPC model accuracy versus lens induced polarization effects in hyper NA immersion lithographyFormat | Member Price | Non-Member Price |
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Paper Abstract
Immersion lithography is extending the lifetime of optical lithography by enabling numerical aperture (NA) greater than
unity. Along with scanner hardware improvements, modeling of hyper-NA lithography systems for optical proximity
correction (OPC) is also continuing to be necessary in improving photolithography capability. With the use of hyper-NA
immersion lithography and polarized illumination, the assumption of scalar optical pupil in optical system modeling may
no longer be valid. To fully describe the transmission of any polarization state through the optical system, Jones matrix is
necessary. It has been shown that Jones matrix can be described as a combination of apodization loss, birefringence,
diattenuation, scalar phase aberrations, and rotation effects. In this work, the impact of such effects on calibration and
accuracy of OPC models is characterized in terms of the model fit quality, model predictability, and changes to OPC
results.
Paper Details
Date Published: 17 October 2008
PDF: 10 pages
Proc. SPIE 7122, Photomask Technology 2008, 712245 (17 October 2008); doi: 10.1117/12.801516
Published in SPIE Proceedings Vol. 7122:
Photomask Technology 2008
Hiroichi Kawahira; Larry S. Zurbrick, Editor(s)
PDF: 10 pages
Proc. SPIE 7122, Photomask Technology 2008, 712245 (17 October 2008); doi: 10.1117/12.801516
Show Author Affiliations
Tamer M. Tawfik, Mentor Graphics Corp. (United States)
Edita Tejnil, Mentor Graphics Corp. (United States)
Published in SPIE Proceedings Vol. 7122:
Photomask Technology 2008
Hiroichi Kawahira; Larry S. Zurbrick, Editor(s)
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