
Proceedings Paper
Comparative scatterometric CD and edge profile measurements on a MoSi mask using different scatterometersFormat | Member Price | Non-Member Price |
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Paper Abstract
At PTB a new type of DUV scatterometer has been developed. The concept of the system is very variable, so that many
different types of measurements like e. g. goniometric scatterometry, ellipsometric scatterometry, polarisation dependent
reflectometry and ellipsometry can be performed. The main applications are CD, pitch and edge profile characterisation
of nano-structured surfaces mainly, but not only, on photomasks. Different operation wavelength down to 193nm can be
used. The system is not only a versatile tool for a variety of different at-wavelength metrology connected with state-of-the-art photolithography. For the evaluation of the measurements the inverse diffraction problem has to be solved. For
this purpose a special FEM-based software has been developed, which is capable to solve both the direct diffraction
problem and the inverse diffraction problem. The latter can be accomplished using different optimisation schemes. To
test both our new scatterometer and the newly developed evaluation software we started systematic comparative CD and
edge profile measurements on a state of the art MoSi phase shift mask. In this paper first results are presented and
compared with results of a commercial scatterometer.
Paper Details
Date Published: 2 May 2008
PDF: 8 pages
Proc. SPIE 6792, 24th European Mask and Lithography Conference, 67920P (2 May 2008); doi: 10.1117/12.798784
Published in SPIE Proceedings Vol. 6792:
24th European Mask and Lithography Conference
Uwe F.W. Behringer, Editor(s)
PDF: 8 pages
Proc. SPIE 6792, 24th European Mask and Lithography Conference, 67920P (2 May 2008); doi: 10.1117/12.798784
Show Author Affiliations
M. Wurm, Physikalisch-Technische Bundesanstalt (Germany)
A. Diener, Physikalisch-Technische Bundesanstalt (Germany)
A. Diener, Physikalisch-Technische Bundesanstalt (Germany)
B. Bodermann, Physikalisch-Technische Bundesanstalt (Germany)
Published in SPIE Proceedings Vol. 6792:
24th European Mask and Lithography Conference
Uwe F.W. Behringer, Editor(s)
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