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Proceedings Paper

Determination of thermal and elastic coefficients of optical thin-film materials
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Paper Abstract

In the aim of describing the thermo-mechanical behaviour of a thin-film filter, simplified models have been studied. An easy way is to determine the evolution of the optical properties of each layer composing the stack, and thus to derive the features change at the component level. Therefore, the knowledge of physical parameters describing each material, such as the coefficient of thermal expansion, the thermo-optic coefficient, the Poisson's ratio and the elasto-optic coefficients, is required. The main challenge is to evaluate these parameters at a single layer level. We propose here a new optical method, based on the analysis of the thermal behaviour of two dedicated Fabry-Perot (FP) structures including a thin disk of the material under study. In parallel, we show through modelling, that we can determine the physical properties of this material with a high accuracy, only by measuring the shift of FP resonance wavelengths. However, we have to take into account the mechanical deformation of the Fabry-Perot structures induced by the thin-film deposition process as well as its evolution with the temperature change (thermal stresses). In this goal, we carried out an accurate study of the thermo-mechanical behaviour of our interferometric structures by using a Finite Element Method.

Paper Details

Date Published: 25 September 2008
PDF: 11 pages
Proc. SPIE 7101, Advances in Optical Thin Films III, 71010S (25 September 2008); doi: 10.1117/12.797707
Show Author Affiliations
S. Michel, Institut Fresnel-UMR CNRS 6133, Domaine Univ. de Saint-Jérôme (France)
F. Lemarquis, Institut Fresnel-UMR CNRS 6133, Domaine Univ. de Saint-Jérôme (France)
M. Lequime, Institut Fresnel-UMR CNRS 6133, Domaine Univ. de Saint-Jérôme (France)

Published in SPIE Proceedings Vol. 7101:
Advances in Optical Thin Films III
Norbert Kaiser; Michel Lequime; H. Angus Macleod, Editor(s)

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