Proceedings Paper
Profilometric characterization of DOEs with continuous microrelief| Format | Member Price | Non-Member Price |
|---|---|---|
| $17.00 | $21.00 |
Paper Abstract
Methodology of local characterization of continuous-relief diffractive optical elements has been discussed. The local
profile depth can be evaluated using "approximated depth" defined without taking a profile near diffractive zone boundaries into account. Several methods to estimate the approximated depth have been offered.
Paper Details
Date Published: 25 September 2008
PDF: 11 pages
Proc. SPIE 7102, Optical Fabrication, Testing, and Metrology III, 710209 (25 September 2008);
Published in SPIE Proceedings Vol. 7102:
Optical Fabrication, Testing, and Metrology III
Angela Duparré; Roland Geyl, Editor(s)
PDF: 11 pages
Proc. SPIE 7102, Optical Fabrication, Testing, and Metrology III, 710209 (25 September 2008);
Show Author Affiliations
V. P. Korolkov, Institute of Automation and Electrometry (Russia)
S. V. Ostapenko, Institute of Automation and Electrometry (Russia)
S. V. Ostapenko, Institute of Automation and Electrometry (Russia)
R. V. Shimansky, Institute of Automation and Electrometry (Russia)
Published in SPIE Proceedings Vol. 7102:
Optical Fabrication, Testing, and Metrology III
Angela Duparré; Roland Geyl, Editor(s)
© SPIE. Terms of Use
