Proceedings Paper
Optical inspection of micro-electromechanical systems| Format | Member Price | Non-Member Price |
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Paper Abstract
We report the results of utilization of wide-gap photorefractive sillenite crystals as adaptive photodetectors (AP) for
optical inspection of micro-electromechanical systems. The operation principle of AP is based on two-wave mixing and
non-steady-state photoelectromotive force effects in photorefractive crystals. The results of measurements of small
vibration amplitudes and resonant frequencies of the diffusely scattering objects and micro-electromechanical systems
are given. The presented adaptive interferometric systems are suitable for industrial applications.
Paper Details
Date Published: 26 September 2008
PDF: 8 pages
Proc. SPIE 7102, Optical Fabrication, Testing, and Metrology III, 710210 (26 September 2008); doi: 10.1117/12.797559
Published in SPIE Proceedings Vol. 7102:
Optical Fabrication, Testing, and Metrology III
Angela Duparré; Roland Geyl, Editor(s)
PDF: 8 pages
Proc. SPIE 7102, Optical Fabrication, Testing, and Metrology III, 710210 (26 September 2008); doi: 10.1117/12.797559
Show Author Affiliations
I. A. Sokolov, A.F. Ioffe Physical-Technical Institute (Russia)
M. A. Bryushinin, A.F. Ioffe Physical-Technical Institute (Russia)
P. M. Karavaev, A.F. Ioffe Physical-Technical Institute (Russia)
M. A. Bryushinin, A.F. Ioffe Physical-Technical Institute (Russia)
P. M. Karavaev, A.F. Ioffe Physical-Technical Institute (Russia)
Published in SPIE Proceedings Vol. 7102:
Optical Fabrication, Testing, and Metrology III
Angela Duparré; Roland Geyl, Editor(s)
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