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Proceedings Paper

Polysilicon thermal micro-actuators for heat scavenging and power conversion
Author(s): Margarita Tecpoyotl-Torres; Jorge Varona; Anas A. Hamoui; Jesús Escobedo-Alatorre; Javier Sanchez-Mondragón
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Paper Abstract

This paper describes the design and experimental characterization of two optimized thermal actuators devised to operate by means of scavenging heat from the environment. Different from the traditional MEMS thermal actuator that relies on electric current to generate heat by Joule effect, the devices herein presented have been optimized to absorb external heat and convert it into mechanical displacement and force. The behavior of vertical and horizontal microactuators fabricated in a standard surface micro-machining process (PolyMUMPs) demonstrates the viability of exploiting heat from the surrounding medium to realize batteryless microsystems. Analytical and finite element models are provided in support of the design. Results show that fairly large and useful displacements can be achieved at commonly available operating temperatures.

Paper Details

Date Published: 9 September 2008
PDF: 11 pages
Proc. SPIE 7043, High and Low Concentration for Solar Electric Applications III, 70430K (9 September 2008); doi: 10.1117/12.795768
Show Author Affiliations
Margarita Tecpoyotl-Torres, Univ. Autónoma del Estado de Morelos (Mexico)
Jorge Varona, Univ. Autónoma del Estado de Morelos (Mexico)
McGill Univ. (Canada)
Anas A. Hamoui, McGill Univ. (Canada)
Jesús Escobedo-Alatorre, Univ. Autónoma del Estado de Morelos (Mexico)
Javier Sanchez-Mondragón, National Institute for Astrophysics, Optics and Electronics (Mexico)

Published in SPIE Proceedings Vol. 7043:
High and Low Concentration for Solar Electric Applications III
Martha Symko-Davies, Editor(s)

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