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Proceedings Paper

Microstructure- and optic-related characteristics of magnesium oxide thin film
Author(s): Ming-Chung Liu; Shih-Chin Yang; Cheng-Chung Lee; Shih-Pu Chen; Jung-Yu Li; Yi-Ping Lin
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Paper Abstract

Plasma display panel is one of the most potential flat devices for large-size displays. Magnesium oxide thin films have been used as a protective layer to improve discharge characteristics and the lifetime of panel. So magnesium oxide thin film is worthy to be studied. Magnesium oxide thin films were prepared by e-beam gun evaporation at a substrate temperature of 200°C. Heat annealing treatment and ion assisted deposition effect on thin films were investigated. The relation between these characteristics of films has been studied. The characteristics of the deposited films, including optical properties, crystalline structure, and microstructure were discussed.

Paper Details

Date Published: 29 August 2008
PDF: 8 pages
Proc. SPIE 7067, Advances in Thin-Film Coatings for Optical Applications V, 70670H (29 August 2008); doi: 10.1117/12.794865
Show Author Affiliations
Ming-Chung Liu, National Central Univ. (Taiwan)
Industrial Technology Research Institute (Taiwan)
Shih-Chin Yang, National Central Univ. (Taiwan)
Cheng-Chung Lee, National Central Univ. (Taiwan)
Shih-Pu Chen, Industrial Technology Research Institute (Taiwan)
Jung-Yu Li, Industrial Technology Research Institute (Taiwan)
Yi-Ping Lin, Industrial Technology Research Institute (Taiwan)

Published in SPIE Proceedings Vol. 7067:
Advances in Thin-Film Coatings for Optical Applications V
Jennifer D. T. Kruschwitz; Michael J. Ellison, Editor(s)

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