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Proceedings Paper

Determining thickness of films on a curved substrate by use of ellipsometric measurement
Author(s): Chien-Yuan Han; Zhen-You Lee; Yu-Faye Chao
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Paper Abstract

The three intensity polarizer-sample-analyzer imaging ellipsometry is used to measure the ellipsometric parameters (&PSgr;,&Dgr;). In addition to the ellipsometric parameters, we introduce an extra angle &agr; to measure the of the azimuth deviation of polarizer. After careful calibration, we found this deviation can indicate how much the surface normal slanted from the plane; then it can be used to deduce the thickness profile coated on a cylindrical lens. Using this technique, we not only can determine the radius curvature of the curved surface, we also can calculate the thickness of the thin film coated on a curved surface.

Paper Details

Date Published: 29 August 2008
PDF: 7 pages
Proc. SPIE 7065, Reflection, Scattering, and Diffraction from Surfaces, 706516 (29 August 2008); doi: 10.1117/12.794178
Show Author Affiliations
Chien-Yuan Han, National United Univ. (Taiwan)
Zhen-You Lee, National Chiao Tung Univ. (Taiwan)
Yu-Faye Chao, National Chiao Tung Univ. (Taiwan)

Published in SPIE Proceedings Vol. 7065:
Reflection, Scattering, and Diffraction from Surfaces
Zu-Han Gu; Leonard M. Hanssen, Editor(s)

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