Results of the first experiment in which Bragg diffraction of a focused x-ray beam was utilized to obtain depth sensitive structural information are presented. Silicon-on-insulator (SOI) layers of 4.5 to 25 μm thick were studied. The beam was focused by a circular zone plate. A beam stop and an order sorting aperture were used to reduce the contribution of the background radiation into diffracted intensity. Diffraction patterns were recorded by a CCD detector placed in the focus of the zone plate. Spatial distributions of the recorded intensity in the scattering plane revealed variations of the lattice constant within the layers. Incoherent scattering was observed out of the scattering plane thus providing a new method to study diffuse scattering. Computer simulations of the intensity patterns produced by the interface between two layers with the lattice constant mismatch are presented.

Date Published: 3 September 2008
PDF: 7 pages
Proc. SPIE 7077, Advances in X-Ray/EUV Optics and Components III, 70770L (3 September 2008); doi: 10.1117/12.793750

Published in SPIE Proceedings Vol. 7077:
Advances in X-Ray/EUV Optics and Components III
Ali M. Khounsary; Christian Morawe; Shunji Goto, Editor(s)