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Proceedings Paper

Effects of high magnetic field on the properties of hot-filament CVD diamond films
Author(s): Jian Huang; Hongyan Peng; Run Xu; Jinyong Xu; Jianmin Liu; Linjun Wang; Yiben Xia
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Paper Abstract

A hot filament chemical vapor deposition (HFCVD) apparatus, combined with a cyro-cooled superconductor magnet, were recently developed. Nanocrystalline diamond (NCD) films were prepared by above HFCVD apparatus either with or without high magnetic field. Surface morphologies of these films were characterized by means of atomic force microscope (AFM). The results indicated that the mean surface roughness and grain size of these films decreased when the magnetic field varied from 0T to 4T. From Raman scattering measurement, all films prepared either with or without high magnetic field exhibit NCD features. These NCD features of the sample prepared with 4T magnetic field was obviously pronounced. The structure of these films was also investigated by X-ray diffraction (XRD).

Paper Details

Date Published: 11 March 2008
PDF: 4 pages
Proc. SPIE 6984, Sixth International Conference on Thin Film Physics and Applications, 69841U (11 March 2008); doi: 10.1117/12.792770
Show Author Affiliations
Jian Huang, Shanghai Univ. (China)
Hongyan Peng, Shanghai Univ. (China)
Run Xu, Shanghai Univ. (China)
Jinyong Xu, Shanghai Univ. (China)
Jianmin Liu, Shanghai Univ. (China)
Linjun Wang, Shanghai Univ. (China)
Yiben Xia, Shanghai Univ. (China)

Published in SPIE Proceedings Vol. 6984:
Sixth International Conference on Thin Film Physics and Applications
Wenzhong Shen; Junhao Chu, Editor(s)

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