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Proceedings Paper

Growth and characterization of Li-doped ZnO thin films on nanocrystalline diamond substrates
Author(s): Jian Huang; Yiben Xia; Linjun Wang; Jinyong Xu; Guang Hu; Xuefeng Zhu; Weimin Shi
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Paper Abstract

Nanocrystalline diamond(NCD) films with a mean surface roughness of 23.8 nm were grown on silicon substrates in a hot filament chemical vapor deposition(HFCVD) system. Then, Zn1-xLixO (x=0, 0.05, 0.10, 0.15) films were deposited on these NCD films by radio-frequency(RF) reactive magnetron sputtering method. When x was 0.1, the Li-doped ZnO film had a larger resistivity more than 108Ω•cm obtained from Hall effect measurement. All the Zn1-xLixO films had a strong c-axis orientation structure determined by X-ray diffraction (XRD). The above results suggested that the Li-doped ZnO film/NCD structure prepared in this work was attractive for the application of high frequency surface acoustic wave (SAW) devices.

Paper Details

Date Published: 11 March 2008
PDF: 4 pages
Proc. SPIE 6984, Sixth International Conference on Thin Film Physics and Applications, 69841T (11 March 2008); doi: 10.1117/12.792639
Show Author Affiliations
Jian Huang, Shanghai Univ. (China)
Yiben Xia, Shanghai Univ. (China)
Linjun Wang, Shanghai Univ. (China)
Jinyong Xu, Shanghai Univ. (China)
Guang Hu, Shanghai Univ. (China)
Xuefeng Zhu, Shanghai Univ. (China)
Weimin Shi, Shanghai Univ. (China)

Published in SPIE Proceedings Vol. 6984:
Sixth International Conference on Thin Film Physics and Applications
Wenzhong Shen; Junhao Chu, Editor(s)

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