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Proceedings Paper

The synthesis and properties of nano-SnO2 thin film by sol-gel
Author(s): Sumei Qin; Ziyang Tong; Ming Guo; Hongmei Deng; Pingxiong Yang
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Paper Abstract

Tin oxide nano-films with different grain-diameter have been synthesized by the modified sol-gel method, used tin chloride dihydrate (SnCl2•2H2O) as main materials and ethanol as solvent. After magnetic agitation and ageing, tin oxide (SnO2) thin films were prepared on silicon substrates by spin-coat process and then annealed at different temperature in oxygen atmosphere. The obtained samples are polycrystalline films with rutile structure and have preferred orientation of (110) direction. The crystal structure, the morphology, and the optical property of the thin films were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM), Fourier Transform Infrared Spectrometer (FT-IR).

Paper Details

Date Published: 11 March 2008
PDF: 5 pages
Proc. SPIE 6984, Sixth International Conference on Thin Film Physics and Applications, 69841M (11 March 2008); doi: 10.1117/12.792631
Show Author Affiliations
Sumei Qin, East China Normal Univ. (China)
Ziyang Tong, East China Normal Univ. (China)
Ming Guo, East China Normal Univ. (China)
Hongmei Deng, Shanghai Univ. (China)
Pingxiong Yang, East China Normal Univ. (China)

Published in SPIE Proceedings Vol. 6984:
Sixth International Conference on Thin Film Physics and Applications
Wenzhong Shen; Junhao Chu, Editor(s)

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