A fast SEM (Scanning electron microscopy) image super resolution algorithm is proposed for e-beam inspection system. There are many super resolution algorithms for optical images. But there are two difference points between SEM image and optical image. Firstly, there is distortion in a SEM image sequence. Secondly, the gray level values for different frame of images are not uniform. To solve the two issues, the whole image is divided into sub-images. Gray level value regularization and sub-pixel shift estimation are done for sub-images. The low complexity of algorithm meets the requirement of real time processing and image display. The test results prove that the super resolution images based on the proposed algorithm restore more detail information...

Date Published: 5 March 2008
PDF: 8 pages
Proc. SPIE 6623, International Symposium on Photoelectronic Detection and Imaging 2007: Image Processing, 66231Z (5 March 2008); doi: 10.1117/12.791536

Published in SPIE Proceedings Vol. 6623:
International Symposium on Photoelectronic Detection and Imaging 2007: Image Processing
Liwei Zhou, Editor(s)