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Proceedings Paper

Evaluation of the fully-depleted back-illuminated CCD for Subaru Suprime-Cam
Author(s): Yukiko Kamata; Satoshi Miyazaki; Hidehiko Nakaya; Takeshi Go Tsuru; Hiroshi Tsunemi; Emi Miyata; Masaharu Muramatsu; Hisanori Suzuki; Kazuhisa Miyaguchi
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Paper Abstract

In order to improve the quantum efficiency (QE) at longer wavelength, we have developed fully-depleted backilluminated CCDs in collaboration with Hamamatsu Photonics K.K (HPK). Recently, HPK delivered 10 CCDs for Subaru Prime Focus Camera (Suprime-Cam). These CCDs are made on N-type, high resistivity silicon wafers. Each CCD has a 200 μm thick depletion layer. The CCD format is four-side buttable, 2k × 4k, 15 μm square pixels with 4 low noise output amplifiers. The characteristics of the CCDs have been tested in the laboratory before they are installed into Suprime-Cam dewar. These CCDs have excellent performance; readout noise < 5 e-, dark current < 2 e-/hour/pixel, parallel and serial charge transfer efficiency (CTE) > 0.999995, and full-well ~ 180,000 e-. The QE of λ = 1 μm was 40 % at -100°C. All CCDs have good cosmetics. Surface flatness is ~ 25 μm peak to value (P-V). The specification was acceptable. We are also developing CCDs for Hype Suprime-Cam (HSC), the next generation instrument for Subaru Telescope. HPK optimized back side process and has developed blue enhanced CCDs for HSC.

Paper Details

Date Published: 22 July 2008
PDF: 9 pages
Proc. SPIE 7021, High Energy, Optical, and Infrared Detectors for Astronomy III, 70211S (22 July 2008); doi: 10.1117/12.790220
Show Author Affiliations
Yukiko Kamata, National Astronomical Observatory (Japan)
Satoshi Miyazaki, National Astronomical Observatory (Japan)
Hidehiko Nakaya, Subaru Telescope, National Astronomical Observatory of Japan (United States)
Takeshi Go Tsuru, Kyoto Univ. (Japan)
Hiroshi Tsunemi, Osaka Univ. (Japan)
Emi Miyata, Osaka Univ. (Japan)
Masaharu Muramatsu, Hamamatsu Photonics K.K. (Japan)
Hisanori Suzuki, Hamamatsu Photonics K.K. (Japan)
Kazuhisa Miyaguchi, Hamamatsu Photonics K.K. (Japan)

Published in SPIE Proceedings Vol. 7021:
High Energy, Optical, and Infrared Detectors for Astronomy III
David A. Dorn; Andrew D. Holland, Editor(s)

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