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Proceedings Paper

Modeling of metal nanoclusters formation, growth, and deposition on a surface under pulsed laser ablation in vacuum
Author(s): German A. Lukyanov; Nikolay Yu. Bykov; Lidia Yu. Nikolaeva
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Paper Abstract

Processes of metal nanoclusters formation under pulsed laser ablation (PLA) of a flat target in vacuum and deposition of ablation products on a flat surface have been studied. The general PLA model consists of three parts: a model which describes absorption of laser radiation and evaporation of the target, a model for description of vapor dynamics and processes of clusters formation and a model of atoms and clusters deposition on the substrate. A heat model based on unsteady one-dimensional heat conduction equation with volumetric heat source has been used to describe laser radiation absorption and heating of the target. An analogous heat model has been used to describe heating of the substrate. The direct simulation Monte-Carlo method has been used to describe vapor expansion and formation of clusters. The process of ablation products (atoms and clusters) transport from the target to the substrate under conditions typical for production of thin films (nanosecond pulses, moderate radiation intensities) has been considered on the example of laser ablation of niobium. Performed numerical investigations allow to establish general correlations between parameters of vapor flow (including clusters parameters) and deposited film properties.

Paper Details

Date Published: 24 January 2008
PDF: 5 pages
Proc. SPIE 6985, Fundamentals of Laser Assisted Micro- and Nanotechnologies, 69850L (24 January 2008); doi: 10.1117/12.787112
Show Author Affiliations
German A. Lukyanov, St. Petersburg State Polytechnical Univ. (Russia)
Nikolay Yu. Bykov, St. Petersburg State Polytechnical Univ. (Russia)
Lidia Yu. Nikolaeva, St. Petersburg State Polytechnical Univ. (Russia)

Published in SPIE Proceedings Vol. 6985:
Fundamentals of Laser Assisted Micro- and Nanotechnologies
Vadim P. Veiko, Editor(s)

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