In this paper we propose a method to use a binary phase and a lens to fulfil array illumination. An equation is given to research the array illumination by a given binary phase grating and a lens. We use a lens with the two main excellences. One is that, the lens can raise the intensity of reflected light from a reflective object. Sometime the reflected light is too weak to be recorded. The other is the spatial structure to be conveniently adjusted by the binary phase grating and the lens. Thus industry measurement relevant to array illumination is more easily carried out.

Date Published: 17 January 2008
PDF: 8 pages
Proc. SPIE 6723, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 67235X (17 January 2008); doi: 10.1117/12.783834

Published in SPIE Proceedings Vol. 6723:
3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Junhua Pan; James C. Wyant; Hexin Wang, Editor(s)