For having sample spectrum, slitting is often used as characteristic objects for OTF measurement. The common measurement methods of OTF from slit image data are firstly presented in this paper. According to deep analysis of image energy distribution of tiny tilted slit, Sub-Extremum Minimum Difference Method (SEMDM) is established. The method uses the rows with energy distributions of slit image stagger one pixel exactly to determine the scale of sub-pixel segment, and LSF data with 3 to 5 times sampling frequency are achieved by several-line low sampling frequency LSF data interpolation Practical test results prove that the algorithm is correct and reliable.

Date Published: 27 November 2007
PDF: 6 pages
Proc. SPIE 6723, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 67231Z (27 November 2007); doi: 10.1117/12.783212

Published in SPIE Proceedings Vol. 6723:
3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Junhua Pan; James C. Wyant; Hexin Wang, Editor(s)