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Proceedings Paper

Monolithic germanium SWIR imaging array
Author(s): Conor S. Rafferty; Clifford A. King; Bryan D. Ackland; Ingvar Aberg; T. S. Sriram; Jay H. O'Neill
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Paper Abstract

NoblePeak Vision has developed monolithic visible to short-wave infrared (SWIR) imaging arrays. An innovative growth technique is used to integrate germanium islands with the silicon transistors and metal layers of a CMOS process. Imaging arrays of 128x128 pixels at a 10 μm pitch were designed and fabricated, with the silicon photodiodes of a conventional CMOS imager replaced by germanium photodiodes. Broadband response from 400 nm to 1650 nm has been measured. Imaging die have been packaged with a Peltier cooler and built into a camera evaluation kit.

Paper Details

Date Published: 15 April 2008
PDF: 9 pages
Proc. SPIE 6940, Infrared Technology and Applications XXXIV, 69400N (15 April 2008); doi: 10.1117/12.782133
Show Author Affiliations
Conor S. Rafferty, NoblePeak Vision (United States)
Clifford A. King, NoblePeak Vision (United States)
Bryan D. Ackland, NoblePeak Vision (United States)
Ingvar Aberg, NoblePeak Vision (United States)
T. S. Sriram, NoblePeak Vision (United States)
Jay H. O'Neill, NoblePeak Vision (United States)

Published in SPIE Proceedings Vol. 6940:
Infrared Technology and Applications XXXIV
Bjørn F. Andresen; Gabor F. Fulop; Paul R. Norton, Editor(s)

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