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Proceedings Paper

On the analysis of adjustment sensitivities of interferometric sensors
Author(s): G. Kloos
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Paper Abstract

While building and adjusting interferometric sensors it is useful to have a clear picture of how different adjustment errors may affect optical properties of the device. While operating the interferometer it is helpful to know how different sensitivities of the instrument influence the measurement. The well-known matrix method provides a convenient means to study these effects systematically in a first order of approximation. It can be applied to calculate the influence of axial misadjustment errors, the influence of tilts as well as the effect of decentering. It will be illustrated that a relatively limited set of mathematical approaches suffices to treat these sensitivities and to study their interplay. It forms a kind of toolbox that can be used to analyze interferometer layouts in a straightforward way. The emphasis will be laid on two-beam interferometers that are described after unfolding the reference and the measurement arm, respectively. The method is advantageous to check compensation schemes and it does allow for a first-order balancing of the arms of two-beam interferometers. Extension to anamorphic optical systems, i.e. optical arrangements that feature a low symmetry, is possible and the influence of a rotation error with respect to the optical axis can be investigated as well. An advantage of the matrix approach can be seen in the fact that it also facilitates to communicate essential features of the interferometric device in a concise way. The attempt is made to present it in a way that it might be applied to a variety of interferometric sensors.

Paper Details

Date Published: 28 April 2008
PDF: 10 pages
Proc. SPIE 7003, Optical Sensors 2008, 70030W (28 April 2008); doi: 10.1117/12.781381
Show Author Affiliations
G. Kloos, Meilute (Germany)

Published in SPIE Proceedings Vol. 7003:
Optical Sensors 2008
Francis Berghmans; Patrick P. Meyrueis; Thomas P. Pearsall; Anna Grazia Mignani; Antonello Cutolo, Editor(s)

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