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Integrated optic Michelson interferometer for sensors application
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Paper Abstract

Integrated optic interferometric systems have been developed since many years and most of them are connected with telecommunication. In case of our group research profile we are focused on integrated optic sensors technology. One of possible application is the atomic force microscope (AFM). In the paper is presented the new concept that combines the AFM with the integrated optic interferometer. In the AFM system a cantilever movement control is the most important. The main goal of the project is improving sensitivity of the AFM by means integrated optic Michelson interferometer (IOMI). The optical waveguide structure was fabricated by surface micromachining technique, based on sandwiched silicon oxide and silicon oxynitride layers. The standard IOMI consist of two Y-junction in which one arm is playing the role of reference arm and other the measuring arm. Such configuration requires four fiber-to-chip connections. Thus, in our configuration, the integrated optic loop mirror in reference arm is fabricated. In the signal arm of our chip standard Grin lens to form an illumination cantilever optical beam is used. In the paper some theoretical descriptions and preliminary results are presented. The possibility of applying the heterodyned detection scheme in a IOMI as a step with sensitivity improvement is described, also. As the project is in progress, the paper is focused in the fabrication of the optical sensor. Next step will be optimization of the electronic part to improve the z-axis sensitivity of the AFM.

Paper Details

Date Published: 20 May 2008
PDF: 8 pages
Proc. SPIE 6995, Optical Micro- and Nanometrology in Microsystems Technology II, 69950A (20 May 2008); doi: 10.1117/12.780791
Show Author Affiliations
P. Marć, Military Univ. of Technology (Poland)
Institut FEMTO-ST (France)
C. Gorecki, Institut FEMTO-ST (France)
Ł. Nieradko, Institut FEMTO-ST (France)

Published in SPIE Proceedings Vol. 6995:
Optical Micro- and Nanometrology in Microsystems Technology II
Christophe Gorecki; Anand Krishna Asundi; Wolfgang Osten, Editor(s)

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