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Proceedings Paper

Ultraprecision micromilling of freeform optical elements for planar microoptical systems integration
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Paper Abstract

Planar microoptical systems integration is a powerful approach for the fabrication of optical systems and has been demonstrated for a large variety of applications. The folded optical axis in combination with planar fabrication technologies enables highly integrated and rugged optical systems. In this geometry, however, specific care is necessary to avoid aberrations resulting from the oblique optical axis. A purely diffractive implementation of these systems generally leads to an efficiency of only a few percent. Combining classical refractive optics with diffractive correction elements increases the overall efficiency. However, the purely refractive implementation suffered from the lack of fabrication technologies for freeform microoptical elements. We present the results of the first fabrication of freeform refractive correction elements combined with standard off-the-shelf refractive microlenses to form a completely refractive planar integrated optical system using ultraprecision micromilling. Experiments confirm the increased optical performance of the systems by integrating two micromachined reflective correction elements. Both elements have a size of 2.4 x 2.4 mm2 with a peak-to-valley surface profile depth of 2.6 μm. They are fabricated with an average roughness height < 40 nm and a surface tolerance < 400 nm.

Paper Details

Date Published: 14 May 2008
PDF: 6 pages
Proc. SPIE 6992, Micro-Optics 2008, 699207 (14 May 2008); doi: 10.1117/12.780310
Show Author Affiliations
Sebastian Stoebenau, Technische Univ. Ilmenau (Germany)
Martin Amberg, Technische Univ. Ilmenau (Germany)
Stefan Sinzinger, Technische Univ. Ilmenau (Germany)

Published in SPIE Proceedings Vol. 6992:
Micro-Optics 2008
Hugo Thienpont; Peter Van Daele; Jürgen Mohr; Mohammad R. Taghizadeh, Editor(s)

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