Share Email Print

Proceedings Paper

Formation of grooves in SiO2 coated silicon using femtosecond ytterbium DPSS laser
Author(s): Andrius Melninkaitis; Tadas Balčiūnas; Valdas Sirutkaitis; Valdemaras Juzumas; Julius Janušonis; Gintas Šlekys
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

Femtosecond laser micromachining of grooves in the SiO2 coated crystal silicon is investigated using 300 fs laser pulses at a center wavelength of 1030 nm. A novel chirped pulse amplified femtosecond Yb:KGW laser source (Pharos, Light Conversion, Lithuania) with high pulse repetition rate of 1- 350 kHz and high average power up to 8 W is employed. The ablation depth of grooves as a function of pulse repetition rate, number of passes over the same groove, and the light polarization relative to the cutting direction is investigated. Different scanning algorithms as well as influence of the focal plane height relative to the sample are investigated.

Paper Details

Date Published: 23 May 2008
PDF: 12 pages
Proc. SPIE 7005, High-Power Laser Ablation VII, 70050L (23 May 2008); doi: 10.1117/12.778478
Show Author Affiliations
Andrius Melninkaitis, Vilnius Univ. (Lithuania)
Tadas Balčiūnas, Vilnius Univ. (Lithuania)
Altechna Co. Ltd. (Lithuania)
Valdas Sirutkaitis, Vilnius Univ. (Lithuania)
Valdemaras Juzumas, Applied Research Institute for Prospective Technologies (Lithuania)
Vilnius Univ. (Lithuania)
Julius Janušonis, Applied Research Institute for Prospective Technologies (Lithuania)
Gintas Šlekys, Altechna Co. Ltd. (Lithuania)

Published in SPIE Proceedings Vol. 7005:
High-Power Laser Ablation VII
Claude R. Phipps, Editor(s)

© SPIE. Terms of Use
Back to Top
Sign in to read the full article
Create a free SPIE account to get access to
premium articles and original research
Forgot your username?