
Proceedings Paper
Development of a high flow-rate/high operating frequency nitinol MEMS valveFormat | Member Price | Non-Member Price |
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Paper Abstract
This paper presents modeling, fabrication, and testing results for a high flow-rate and high frequency Nitinol MEMS
valve. ANSYS(R) is used to evaluate several Nitinol MEMS valve structural designs with the conclusion that a
pentagonal flap with five legs produces higher frequencies and higher strengths without the inherent rotation problem
present in standard designs. The Nitinol penta-leg design was fabricated using a novel bi-layer lift-off method. A
PMGI polymer layer is initially used as an underlayer while a chromium layer is used as a top layer to produce a non-rotational
ortho-planar Nitinol MEMS valve array. This array consists of 65 microvalves with dimensions of 1mm in
circumference, 50 μm in leg width, and 8.2 μm in Nitinol thickness. Each microvalve covers an orifice of 220 μm in
diameter and 500 μm in length and is capable of producing a 150 μm vertical deflection. This Nitinol MEMS valve
array was tested for flow-rates in a hydraulic system as a function of applied pressure with a maximum water flow-rate
of 16.44 cc/s.
Paper Details
Date Published: 22 April 2008
PDF: 9 pages
Proc. SPIE 6932, Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2008, 69322F (22 April 2008); doi: 10.1117/12.775812
Published in SPIE Proceedings Vol. 6932:
Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2008
Masayoshi Tomizuka, Editor(s)
PDF: 9 pages
Proc. SPIE 6932, Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2008, 69322F (22 April 2008); doi: 10.1117/12.775812
Show Author Affiliations
Myunghoon Seong, Univ. of California/Los Angeles (United States)
K. P. Mohanchandra, Univ. of California/Los Angeles (United States)
K. P. Mohanchandra, Univ. of California/Los Angeles (United States)
Yohan Lin, NASA Dryden Flight Research Ctr. (United States)
Gregory P. Carman, Univ. of California/Los Angeles (United States)
Gregory P. Carman, Univ. of California/Los Angeles (United States)
Published in SPIE Proceedings Vol. 6932:
Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2008
Masayoshi Tomizuka, Editor(s)
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