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Proceedings Paper

Nanoscale growth control of functional thin films on atomically surface-controlled substrates by laser MBE
Author(s): Wakana Hara; Mamoru Yoshimoto
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Paper Abstract

The nanoscale growth control of functional ceramic thin films was examined by our originally developed technique, which was based on the nanoscale substrate engineering as well as atomic layer control via laser molecular beam epitaxy (laser-MBE). The atomically controlled surface of the substrate such as the ultrasmooth sapphire (single-crystal Al2O3) substrate with atomic steps and atomically smooth terraces was found to enhance atomically layer-by-layer growth as well as self-assembled nucleation along the atomic steps. The novel epitaxial growths could be attained on the physically or chemically controlled substrates, that is, (1) termination-regulated molecular layer-by-layer epitaxy, (2) step-decoration epitaxy resulting in the nanowire or nanodots, (3) room-temperature epitaxial growth of AlN, and (4) self-organized formation of the nanogroove-striped pattern on the film surface.

Paper Details

Date Published: 14 February 2008
PDF: 9 pages
Proc. SPIE 6879, Photon Processing in Microelectronics and Photonics VII, 68790V (14 February 2008); doi: 10.1117/12.773283
Show Author Affiliations
Wakana Hara, Tokyo Institute of Technology (Japan)
Mamoru Yoshimoto, Tokyo Institute of Technology (Japan)

Published in SPIE Proceedings Vol. 6879:
Photon Processing in Microelectronics and Photonics VII
David B. Geohegan; Andrew S. Holmes; Michel Meunier; Frank Träger; Craig B. Arnold; Jan J. Dubowski; Hiroyuki Niino, Editor(s)

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