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Proceedings Paper

MuGFET observation and CD measurement by using CD-SEM
Author(s): Tatsuya Maeda; Maki Tanaka; Miki Isawa; Kenji Watanabe; Norio Hasegawa; Kohei Sekiguchi; Rita Rooyackers; Nadine Collaert; Tom Vandeweyer
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Paper Abstract

Multiple Gate Field Effect Transistors (MuGFETs) have been proposed to enable downsizing, when scaling the transistors to the 32nm technology node. The dimension of the gate on the surface of fin determines the effective channel length of the device. So, the characterization of the gate profiles at fin sidewalls becomes extremely critical. It is especially important to quantify the rounded intersection (etch residual) at the intersection of the fin and gate. In this report, we show top down images of a MuGFET taken with critical-dimension scanning electron microscopy (CD-SEM) and the results that were measured and characterized by measuring various portions of the pattern which will impact the MuGFET performance i.e. gate length, fin width. We will introduce a quantified relation between fin length and "its effect on the etch residue at the intersection of fin and gate". Next we discuss our approaches to analyze the variation of the shape of the gate at the fin sidewall.

Paper Details

Date Published: 24 March 2008
PDF: 9 pages
Proc. SPIE 6922, Metrology, Inspection, and Process Control for Microlithography XXII, 69222P (24 March 2008); doi: 10.1117/12.771861
Show Author Affiliations
Tatsuya Maeda, Hitachi High-Technologies Corp. (Japan)
Maki Tanaka, Hitachi, Ltd. (Japan)
Miki Isawa, Hitachi High-Technologies Corp. (Japan)
Kenji Watanabe, Hitachi High-Technologies Corp. (Japan)
Norio Hasegawa, Hitachi High-Technologies Corp. (Japan)
Kohei Sekiguchi, Hitachi High-Technologies Europe GmbH (Germany)
Rita Rooyackers, IMEC vzw (Belgium)
Nadine Collaert, IMEC vzw (Belgium)
Tom Vandeweyer, IMEC vzw (Belgium)

Published in SPIE Proceedings Vol. 6922:
Metrology, Inspection, and Process Control for Microlithography XXII
John A. Allgair; Christopher J. Raymond, Editor(s)

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