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Proceedings Paper

Development and optimization of microcantilever based IR imaging arrays
Author(s): Scott R. Hunter; Gregory S. Maurer; Gregory Simelgor; Shankar Radhakrishnan; John Gray; Ken Bachir; Thomas Pennell; Martin Bauer; Usha Jagadish
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Paper Abstract

Multispectral Imaging has recently made considerable improvements to the sensitivity, uniformity and dynamic range of infrared FPAs based on capacitively read, bimorph microcantilever sensor technology. The company is presently prototyping 160x120 imaging arrays with 50 μm pitch pixels and is actively pursuing the development of next generation 25 μm pitch pixel arrays. Measured peak NETD values for recently fabricated 50μm pitch focal plane arrays are in the 40-50mK range, with individual pixels in the 10-15mK range. The modeled and measured tradeoffs discussed in this paper lead to a possible 2-3 times further improvement in average NETD. A number of factors influence the performance of these devices which includes the optimization of sometimes competing design requirements. For example, the tuning and optimization of the infrared optical resonant cavity structure while maximizing the change in sensor capacitance during IR irradiance. Similarly there are tradeoffs between structural rigidity, which increases the structure resonant frequency improving noise immunity, and thermal response times. These tradeoffs are discussed with reference to real world sensor structures. Results from detailed thermo-electromechanical-optical modeling of the operation of the 25 μm pitch pixels will be discussed in reference to the design and fabrication of 25 μm pitch test pixels. The most recent infrared sensitivity and other performance measurements from the development of the company's first commercial 160 x 120 pixel imaging array product will also be presented.

Paper Details

Date Published: 16 April 2008
PDF: 12 pages
Proc. SPIE 6940, Infrared Technology and Applications XXXIV, 694013 (16 April 2008); doi: 10.1117/12.771652
Show Author Affiliations
Scott R. Hunter, Multispectral Imaging, Inc. (United States)
Gregory S. Maurer, Multispectral Imaging, Inc. (United States)
Gregory Simelgor, Multispectral Imaging, Inc. (United States)
Shankar Radhakrishnan, Multispectral Imaging, Inc. (United States)
John Gray, Multispectral Imaging, Inc. (United States)
Ken Bachir, Multispectral Imaging, Inc. (United States)
Thomas Pennell, Multispectral Imaging, Inc. (United States)
Martin Bauer, Multispectral Imaging, Inc. (United States)
Usha Jagadish, Multispectral Imaging, Inc. (United States)

Published in SPIE Proceedings Vol. 6940:
Infrared Technology and Applications XXXIV
Bjørn F. Andresen; Gabor F. Fulop; Paul R. Norton, Editor(s)

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