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Proceedings Paper

Precise open-loop control of MEMS deformable mirror shape
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Paper Abstract

A new method is introduced for predicting control voltages that will generate a prescribed surface shape on a deformable mirror. The algorithm is based upon an analytical elastic model of the mirror membrane and an empirical electromechanical model of its actuators. It is computationally simple and inherently fast. Shapes at the limit of achievable mirror spatial frequencies with up to 1.5μm amplitudes have been achieved with less than 15nm RMS error.

Paper Details

Date Published: 8 February 2008
PDF: 5 pages
Proc. SPIE 6888, MEMS Adaptive Optics II, 68880P (8 February 2008); doi: 10.1117/12.769492
Show Author Affiliations
Thomas Bifano, Boston Univ. (United States)
Jason Stewart, Boston Univ. (United States)
Alioune Diouf, Boston Univ. (United States)

Published in SPIE Proceedings Vol. 6888:
MEMS Adaptive Optics II
Scot S. Olivier; Thomas G. Bifano; Joel A. Kubby, Editor(s)

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