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Proceedings Paper

Optical waveguide gratings in chalcogenide glass
Author(s): Xin Xia; Mehmet Solmaz; Hyunsoo Park; Xing Cheng; Christi K. Madsen
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Paper Abstract

Fabrication results are reported for making optical gratings in chalcogenide glasses. Two approaches are being investigated: 1) thermal nanoimprinting of the glass using a mold master, and 2) direct patterning of the chalcogenide glass using a combination of electron beam lithography (EBL) and reactive ion etching (RIE). Preliminary results are presented for the nanoimprint and EBL experiments. The nanoimprint results show very smooth sidewalls.

Paper Details

Date Published: 12 February 2008
PDF: 8 pages
Proc. SPIE 6896, Integrated Optics: Devices, Materials, and Technologies XII, 689607 (12 February 2008); doi: 10.1117/12.768584
Show Author Affiliations
Xin Xia, Texas A&M Univ. (United States)
Mehmet Solmaz, Texas A&M Univ. (United States)
Hyunsoo Park, Texas A&M Univ. (United States)
Xing Cheng, Texas A&M Univ. (United States)
Christi K. Madsen, Texas A&M Univ. (United States)

Published in SPIE Proceedings Vol. 6896:
Integrated Optics: Devices, Materials, and Technologies XII
Christoph M. Greiner; Christoph A. Waechter, Editor(s)

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