
Proceedings Paper
Dual-detector optical MEMS spectrum analyzer: advances, applications, and prospectsFormat | Member Price | Non-Member Price |
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Paper Abstract
The spectroscopy market is enduring and growing one, in which the near infrared spectroscopy by means of the
advances plays an important and indispensable role. Some nameable advances are the noninvasive character, the
rapidity, which allows real-time measurements or the flexible sampling and sample presentation. To establish near
infrared spectroscopic methods and tests at a wide variety of applications new technological innovations are
necessary. One of these technological innovations is a modern scanning micro mirror spectrometers. We have
developed a small sized, light weight MOEMS-spectrometers for different spectral regions which are due to the
optical parameters less expensive, more flexible and offer better performance than traditional spectrometers even yet.
The central component of the optical set-up is a large area scanning micro mirror, which oscillates in resonance with
250Hz. Thus, to record a single spectrum only 4 milliseconds are necessary.
One of the important factors of NIR spectroscopy, which affects qualitative and quantitative determination, is the
sample presentation. For optimal signal processing different sample presentation techniques such as transmission and
flow cells, integrating spheres and attenuated total reflection (ATR) probes were realized. Consequently in
combination with chemometric methods e.g. partial least square or principal component analysis several applications
could be performed and investigated. This article describes the principles and the advances of the promising
technology as well as some realized applications. Furthermore influences of the sample presentation and calibration
procedures will be discussed closer.
Paper Details
Date Published: 11 February 2008
PDF: 7 pages
Proc. SPIE 6887, MOEMS and Miniaturized Systems VII, 68870D (11 February 2008); doi: 10.1117/12.768356
Published in SPIE Proceedings Vol. 6887:
MOEMS and Miniaturized Systems VII
David L. Dickensheets; Harald Schenk, Editor(s)
PDF: 7 pages
Proc. SPIE 6887, MOEMS and Miniaturized Systems VII, 68870D (11 February 2008); doi: 10.1117/12.768356
Show Author Affiliations
Thomas Otto, Fraunhofer Institute for Reliability and Microintegration (Germany)
Ray Saupe, Fraunhofer Institute for Reliability and Microintegration (Germany)
Alexander Weiss, Chemnitz Univ. of Technology (Germany)
Volker Stock, Colour Control Farbmesstechnik GmbH (Germany)
Ray Saupe, Fraunhofer Institute for Reliability and Microintegration (Germany)
Alexander Weiss, Chemnitz Univ. of Technology (Germany)
Volker Stock, Colour Control Farbmesstechnik GmbH (Germany)
Kerstin Wiesner, Siemens AG (Germany)
Uwe Lampe, Siemens AG (Germany)
Maximilian Fleischer, Siemens AG (Germany)
Thomas Gessner, Fraunhofer Institute for Reliability and Microintegration (Germany)
Chemnitz Univ. of Technology (Germany)
Uwe Lampe, Siemens AG (Germany)
Maximilian Fleischer, Siemens AG (Germany)
Thomas Gessner, Fraunhofer Institute for Reliability and Microintegration (Germany)
Chemnitz Univ. of Technology (Germany)
Published in SPIE Proceedings Vol. 6887:
MOEMS and Miniaturized Systems VII
David L. Dickensheets; Harald Schenk, Editor(s)
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