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Proceedings Paper

Simulation and interferometer results of MEMS deformable mirrors
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Paper Abstract

Various types of large stroke actuators for Adaptive Optics (AO) were simulated individually and as part of a mirror system consisting of actuators bonded to face plates with different boundary conditions. The actuators and faceplate were fabricated using a high aspect ratio process that enables the fabrication of 3-dimensional Micro-Electro-Mechanical System (MEMS) devices. This paper will review simulation results along with measurements of the displacement of the actuators utilizing a white-light interferometer. Both simulations and interferometer scans have shown the ability of the actuators to achieve displacements of 1/3 of the initial gap between the spring layer and the counter electrode.

Paper Details

Date Published: 8 February 2008
PDF: 12 pages
Proc. SPIE 6888, MEMS Adaptive Optics II, 68880R (8 February 2008);
Show Author Affiliations
Bautista Fernández, Univ. of California, Santa Cruz (United States)
Joel Kubby, Univ. of California, Santa Cruz (United States)

Published in SPIE Proceedings Vol. 6888:
MEMS Adaptive Optics II
Scot S. Olivier; Thomas G. Bifano; Joel A. Kubby, Editor(s)

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