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Proceedings Paper

Support for microsystems simulation: Are we watching the clock?
Author(s): C. K. Drummond; F. J. Lisy
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Paper Abstract

Real world Microsystems devices are multi-disciplinary, adaptive, and non-linear. Along the critical development path of Microsystems is a conspicuous absence of materials data, including materials compatibility and life models. To advance the state-of-the art in simulation, ASM has completed the first of three phases of a materials database development effort. The "strides and stumbles" associated with the database are discussed and opportunities for collaboration identified, particularly in the area of material reliability and harsh environment life prediction efforts. A materials database can benefit systems design and simulation efforts, but a phased approach to this undertaking is essential. Case-studies originally intended to validate the database became a surprising component of development strategy. ASM is seeking and welcomes opportunities for collaboration with other research groups as this interdisciplinary project moves forward.

Paper Details

Date Published: 19 February 2008
PDF: 10 pages
Proc. SPIE 6884, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VII, 68840S (19 February 2008); doi: 10.1117/12.764500
Show Author Affiliations
C. K. Drummond, ASM International (United States)
F. J. Lisy, Orbital Research, Inc. (United States)

Published in SPIE Proceedings Vol. 6884:
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VII
Allyson L. Hartzell; Rajeshuni Ramesham, Editor(s)

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