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Proceedings Paper

A novel method of creating a surface micromachined 3D optical assembly for MEMS-based miniaturized FTIR spectrometers
Author(s): D. Reyes; E. R. Schildkraut; J. Kim; R. F. Connors; P. Kotidis; D. J. Cavicchio
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Paper Abstract

This paper describes design, fabrication, and characterization of a miniaturized, Fourier transform infrared (FTIR) spectrometer for the detection and identification of toxic or flammable gases. By measuring the absorption by the target material of IR radiation, unambiguous detection and identification can be achieved. The key component of the device is a micromachined Michelson interferometer capable of modulating light in the 2 - 14 μm spectral region. Two major technical achievements associated with developing a MEMS interferometer module are discussed: development of a micromirror assembly having an order of magnitude larger modulation stroke to approach laboratory instrument-grade spectral resolutions; and assembly of monolithic, millimeter-scale optical components using multi-layer surface micromachining techniques to produce an extremely low cost MEMS interferometer, which has an unprecedented optical throughput. We have manufactured and tested the device. Reported optical characterization results include a precisely aligned, static interferogram acquired from an assembled Michelson interferometer using visible light wavelengths, which promises a high sensitivity FTIR spectrometer for its size.

Paper Details

Date Published: 8 February 2008
PDF: 8 pages
Proc. SPIE 6888, MEMS Adaptive Optics II, 68880D (8 February 2008); doi: 10.1117/12.764006
Show Author Affiliations
D. Reyes, Block MEMS, LLC (United States)
E. R. Schildkraut, Block MEMS, LLC (United States)
J. Kim, Block MEMS, LLC (United States)
R. F. Connors, Block MEMS, LLC (United States)
P. Kotidis, Block MEMS, LLC (United States)
D. J. Cavicchio, Block MEMS, LLC (United States)

Published in SPIE Proceedings Vol. 6888:
MEMS Adaptive Optics II
Scot S. Olivier; Thomas G. Bifano; Joel A. Kubby, Editor(s)

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