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Proceedings Paper

Mobile flat mirrors for micro-optical scanners
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Paper Abstract

A mobile (electrostatic) flat mirror is designed to bend visible light, and can be fabricated on crystalline silicon by means of photolithography and humid etching. Using the CoventorWareTM software we carry out a simulation of the fabrication process as well as the movement versus voltage of the mobile (electrostatic) flat mirror, which dimensions are 50 microns large by 40 microns width. The required voltage to move the flat mirror 2.17° is 38.1 V. The flatness of the micro-mirror is enough to bend the light in the visible range.

Paper Details

Date Published: 8 February 2008
PDF: 8 pages
Proc. SPIE 6887, MOEMS and Miniaturized Systems VII, 68870K (8 February 2008); doi: 10.1117/12.763512
Show Author Affiliations
G. Molar-Velázquez, Instituto Nacional de Astrofísica, Óptica y Electrónica (Mexico)
F. J. Renero-Carrillo, Instituto Nacional de Astrofísica, Óptica y Electrónica (Mexico)
W. Calleja-Arriaga, Instituto Nacional de Astrofísica, Óptica y Electrónica (Mexico)

Published in SPIE Proceedings Vol. 6887:
MOEMS and Miniaturized Systems VII
David L. Dickensheets; Harald Schenk, Editor(s)

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