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Proceedings Paper

Aspect ratios, sizes, and etch rates in photostructurable glass-ceramic
Author(s): J. Stillman; J. Judy; H. Helvajian
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Paper Abstract

Photostructurable glass-ceramics (PSGCs), although not yet widely used, are well suited to many micro-optical and micromechanical applications. Their appeal stems from the combination of the physical properties of glass-ceramics with the excellent three-dimensional shaping control that can be achieved by laser-patterning a transparent photostructurable material. The PSGCs are both mechanically and thermally robust. Exposure with a focused 355-nm pulsed laser beam initiates a cascade of reactions that ends in crystallization of a different phase of the glass-ceramic. The crystal-rich phase etches chemically much faster than the original crystal-free phase. In this experiment, we examined the dependence of the chemical etch rate on the aspect ratios and sizes of structures made from Foturan, a commercially available PSGC. We fabricated several types of test structures in 1-mm-thick Foturan samples. We tested the initial and long-term etch behavior of Foturan etched in 5% HF as a function of the size of the etched structure. An aspect ratio of 100 for a 10-μm-wide trench etched through a 1000-μm-thick sample was achieved.

Paper Details

Date Published: 26 February 2008
PDF: 11 pages
Proc. SPIE 6882, Micromachining and Microfabrication Process Technology XIII, 68820J (26 February 2008); doi: 10.1117/12.761895
Show Author Affiliations
J. Stillman, The Aerospace Corp. (United States)
Univ. of California, Los Angeles (United States)
J. Judy, Univ. of California, Los Angeles (United States)
H. Helvajian, The Aerospace Corp. (United States)

Published in SPIE Proceedings Vol. 6882:
Micromachining and Microfabrication Process Technology XIII
Mary-Ann Maher; Jung-Chih Chiao; Paul J. Resnick, Editor(s)

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