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Proceedings Paper

Development of a simple user-friendly commercial digital holographic microscope
Author(s): Oi Choo Chee; Vijay Raj Singh; Eddy Sim; Anand Asundi
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Paper Abstract

We report the development of a simple commercial digital holographic microscope. The hologram is recorded using a CCD sensor and numerically reconstructed to provide quantitative analysis of the object. The laser source is coupled via fibre optics and the opto-mechanical setup is flexible and customizable for either the reflection or transmission mode. The user-friendly software allows live reconstruction, simultaneously providing both the amplitude and phase images. System performance is improved with phase unwrapping and interferometric comparison. Additional features include various image enhancements, cross-sectional and line profiling, measurement and data analysis tools for quantitative 3D imaging and surface topography measurement. The performance of the product is tested on different micro devices, glass and silicon surfaces.

Paper Details

Date Published: 25 January 2008
PDF: 7 pages
Proc. SPIE 6912, Practical Holography XXII: Materials and Applications, 69120V (25 January 2008); doi: 10.1117/12.760625
Show Author Affiliations
Oi Choo Chee, Ngee Ann-AEM Ctr. of Innovation (Singapore)
Vijay Raj Singh, Ngee Ann-AEM Ctr. of Innovation (Singapore)
Eddy Sim, Ngee Ann-AEM Ctr. of Innovation (Singapore)
Anand Asundi, Nanyang Technological Univ. (Singapore)

Published in SPIE Proceedings Vol. 6912:
Practical Holography XXII: Materials and Applications
Hans I. Bjelkhagen; Raymond K. Kostuk, Editor(s)

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