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Proceedings Paper

High Q microring resonator in silicon-on-insulator rib waveguides
Author(s): Qingzhong Huang; Jinzhong Yu; Shaowu Chen; Xuejun Xu
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Paper Abstract

A high quality (Q) factor microring resonator in silicon-on-insulator rib waveguides was fabricated by electron beam lithography, followed by inductively coupled plasma etching. The waveguide dimensions were scaled down to submicron, for a low bending loss and compactness. Experimentally, the resonator has been realized with a quality factor as high as 21,200, as well as a large extinction ratio 12.5dB at telecommunication wavelength near 1550nm. From the measured results, propagation loss in the rib waveguide is determined as low as 6.90dB/cm. This high Q microring resonator is expected to lead to high speed optical modulators and bio-sensing devices.

Paper Details

Date Published: 8 January 2008
PDF: 6 pages
Proc. SPIE 6838, Optoelectronic Devices and Integration II, 68380J (8 January 2008); doi: 10.1117/12.760218
Show Author Affiliations
Qingzhong Huang, Institute of Semiconductors (China)
Jinzhong Yu, Institute of Semiconductors (China)
Shaowu Chen, Institute of Semiconductors (China)
Xuejun Xu, Institute of Semiconductors (China)

Published in SPIE Proceedings Vol. 6838:
Optoelectronic Devices and Integration II
Xuping Zhang; Hai Ming; Maggie Yihong Chen, Editor(s)

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