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Proceedings Paper

Porous silicon surface feature size estimation using the reflectance spectrum
Author(s): Christopher Lowrie; Susan Earles; M. de Fernandez
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Paper Abstract

In this paper we excite the surface of porous silicon with incoherent, broad band white light and observe the spectrum of colors reflected from the surface. Using an atomic force microscope images from red and green porous silicon samples are collected. In this paper we relate the optical color of the surface to the size of scattering features on the textured surface. From image segmentation using the watershed transform the height distributions of the optical scattering features are determined. The heights of these surface features are then used as input variables to a computer simulation of a reflective grating. The computer predicted color is compared to the measured color. In this manner, by inspection of the reflected color from the textured porous silicon surface the physical size of the surface features can be estimated.

Paper Details

Date Published: 13 February 2008
PDF: 6 pages
Proc. SPIE 6898, Silicon Photonics III, 68981F (13 February 2008); doi: 10.1117/12.759323
Show Author Affiliations
Christopher Lowrie, Florida Institute of Technology (United States)
Susan Earles, Florida Institute of Technology (United States)
M. de Fernandez, Florida Institute of Technology (United States)

Published in SPIE Proceedings Vol. 6898:
Silicon Photonics III
Joel A. Kubby; Graham T. Reed, Editor(s)

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