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Proceedings Paper

Accurate vibration detection of a rough surface
Author(s): Hualin Zeng; Yan Zhou; Songtao Fan; Jun He
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Paper Abstract

Based on the semiconductor laser whose spectral line with width is compressed to be less than 1.2Mhz, a system was designed to measure and improve the amplitude and frequency of the real-time microvibration with sinusoidal modulation. real-time microvibration measurement was executed without alignment problem in the interferometry; and low-frequency disturbance of environment could be eliminated. Suggestions were also given to consummate the system. The system also has resistance against the low frequency disturbance of the environment.

Paper Details

Date Published: 4 January 2008
PDF: 5 pages
Proc. SPIE 6831, Nanophotonics, Nanostructure, and Nanometrology II, 683118 (4 January 2008); doi: 10.1117/12.757367
Show Author Affiliations
Hualin Zeng, Institute of Semiconductors (China)
Yan Zhou, Institute of Semiconductors (China)
Songtao Fan, Institute of Semiconductors (China)
Jun He, Institute of Semiconductors (China)

Published in SPIE Proceedings Vol. 6831:
Nanophotonics, Nanostructure, and Nanometrology II
Xing Zhu; Stephen Y. Chou; Yasuhiko Arakawa, Editor(s)

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