Proceedings Paper
Tunable thin-film filters of multiple-channel based on thermo-optic| Format | Member Price | Non-Member Price |
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Paper Abstract
A tunable thin-film filter of multi-channel based on thermo-optic is designed. The filer is made of amorphous silicon and silicon nitride layers grown by PECVD. Multiple-channel filer is obtained by designing the structure of the cavity. Due to the excellent thermo-optical property of a-Si, the refractive index of the cavity will be changed by heating; the filter's peaks wavelength and the width between adjacent routeways will therefore shift substantially. The tuning range is >17nm and the tuning coefficient (dλ/dT) is 0.085nm/K.
Paper Details
Date Published: 8 January 2008
PDF: 7 pages
Proc. SPIE 6838, Optoelectronic Devices and Integration II, 68381W (8 January 2008); doi: 10.1117/12.757344
Published in SPIE Proceedings Vol. 6838:
Optoelectronic Devices and Integration II
Xuping Zhang; Hai Ming; Maggie Yihong Chen, Editor(s)
PDF: 7 pages
Proc. SPIE 6838, Optoelectronic Devices and Integration II, 68381W (8 January 2008); doi: 10.1117/12.757344
Show Author Affiliations
Dong Tian, Univ. of Electronic Science and Technology of China (China)
Shuang Liu, Univ. of Electronic Science and Technology of China (China)
Shuang Liu, Univ. of Electronic Science and Technology of China (China)
Bing-yi Wang, Univ. of Electronic Science and Technology of China (China)
Published in SPIE Proceedings Vol. 6838:
Optoelectronic Devices and Integration II
Xuping Zhang; Hai Ming; Maggie Yihong Chen, Editor(s)
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