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Proceedings Paper

Tunable thin-film filters of multiple-channel based on thermo-optic
Author(s): Dong Tian; Shuang Liu; Bing-yi Wang
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Paper Abstract

A tunable thin-film filter of multi-channel based on thermo-optic is designed. The filer is made of amorphous silicon and silicon nitride layers grown by PECVD. Multiple-channel filer is obtained by designing the structure of the cavity. Due to the excellent thermo-optical property of a-Si, the refractive index of the cavity will be changed by heating; the filter's peaks wavelength and the width between adjacent routeways will therefore shift substantially. The tuning range is >17nm and the tuning coefficient (dλ/dT) is 0.085nm/K.

Paper Details

Date Published: 8 January 2008
PDF: 7 pages
Proc. SPIE 6838, Optoelectronic Devices and Integration II, 68381W (8 January 2008); doi: 10.1117/12.757344
Show Author Affiliations
Dong Tian, Univ. of Electronic Science and Technology of China (China)
Shuang Liu, Univ. of Electronic Science and Technology of China (China)
Bing-yi Wang, Univ. of Electronic Science and Technology of China (China)

Published in SPIE Proceedings Vol. 6838:
Optoelectronic Devices and Integration II
Xuping Zhang; Hai Ming; Maggie Yihong Chen, Editor(s)

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